LAM Research 490 AutoEtch Polysilicon

Condition: “As is” 

Date of manufacture: unknown

Wafer size 150mm

Polysilicon : 490

Wafer size : 6 inch

Upgraded TFT monitors

Incl maintenance console

Conditon : AS IS (No Chiller , No pump but with ENI RF Generator)

Features :

Single wafer processing

Fully automated microprocessor control

Cassette to cassette wafer

processing

Vacuum load locked

Programmable , variable electrode spacing

Endpoint detection

Configurable for 3 inch to 6 inch wafers

Stand alone or bulk head mount configuration