2015 Ebara OXT-14 Modular Pump Rack System – 4-Channel Automated Foreline Skid, New

Manufacturer:

Ebara Technologies, Inc.

Model:

OXT-14

Year:

2015

Condition:

New Surplus (Never Installed)

Description

High-spec modular subfab pump rack system originally built for a tier 1 fab (2015) and never installed. This is a complete 4-channel foreline vacuum interface skid designed for 300 mm semiconductor tools (especially etch clusters such as TEL platforms).

Unlike basic pump frames, this unit includes fully integrated vacuum, gas purge, cooling water, and automated valve control systems, making it a near plug-and-play subfab module.

Ideal for:

• TEL / Lam / Applied Materials etch tool refurbishments
• Subfab capacity expansion
• Spare module for high-volume manufacturing lines

Key Features

Vacuum / Foreline System

• 4x independent foreline branches (multi-chamber support)
• Motorized high-vacuum isolation valves (HVA actuators) (2 x 71911-0303M-001, 2x 71110-0303M-001)
• Stainless steel manifolds with flex bellows
• Designed for corrosive etch exhaust environments

Pump Interface

• Compatible with Ebara dry pumps (A70 / A80 / EV series typical)
• Per-line isolation and service capability
• Centralized pump interface control (24 VDC I/O)

Gas System (Certified)

• Integrated N₂ purge / ballast gas stick
• Tescom pressure regulator + Ashcroft gauge
• Helium leak tested and certified (FST Technical Services, 2015)
• Cleanroom-grade stainless tubing

Cooling Water System

• Integrated cooling loop with flow control
• Evans Components rotameter (visual flow indication)
• Manual control valves for each circuit
• Designed for multi-pump cooling distribution

Controls & Electrical

• Ebara OXT-14 control panel
• 208 VAC, 3-phase
• 24 VDC interface for tool integration
• Emergency stop and local controls

Mechanical / Build

• Modular steel frame (cleanroom-compatible design)
• Preconfigured foreline & exhaust routing
• Utility connection points (gas, water, power)
• Built by Ebara Technologies inc in Sacramento California

Technical Highlights

• Configuration: 4-channel foreline skid
• Voltage: 208 VAC, 3-phase
• Control: 24 VDC interface
• Gas: N₂ purge system (regulated)
• Cooling: Integrated water loop (approx. 1–10 GPM per line typical – verify)
• Application: 300 mm etch / CVD subfab systems

Condition Notes

• Never installed (Intel surplus)
• Stored indoors in warehouse environment
• All lines capped and protected
• Gas system helium leak certified (tag dated 2/17/2015)
• Minor inspection recommended for seals due to age (standard for surplus)

What’s Included

• Complete pump rack skid as shown
• Integrated gas stick (regulator, gauge, tubing)
• Cooling water flowmeter and valves
• Motorized isolation valves (installed)
• Control cabinet (mounted)
• Original installed components and fittings

(Pumps not included)

Applications

• Semiconductor etch tools (TEL Unity / Tactras, Lam TCP/Kiyo, AMAT DPS)
• Multi-chamber vacuum systems
• Subfab retrofits and expansions
• Research fabs requiring multi-line vacuum control

Advantages vs Standard Pump Frames

• Fully integrated utilities (gas + water + vacuum)
• Automated valve control (not manual-only)
• Cleanroom-certified gas handling
• Faster installation and lower integration cost

Shipping & Logistics

• Skid-mounted (as shown)
• Forklift loadable
• Crating available upon request
• Worldwide shipping available

Seller Notes

Rare opportunity to acquire a complete, unused OEM-grade subfab module. Comparable systems are typically only available as part of full tool installs.

Pricing

Contact for quote (priced to move vs new OEM systems)