2003 AMAT Endura HP PVD

Work size: 6¢ 

150mm

Transfer robot:

Buffer: HP

Transformer: HP

Type: manual

Body: narrow

Cassette: Metal

Mapping: STD

Indexer: Manual

ChA: PT STD Lid 

ChB: CD ( F I a t ) STD Lid

ChE: OD With Temp Moniter 

ChF: OD With Temp Moniter