CHA Mark 40 Electron Beam Evaporator

CHA Mark 40 Electron Beam Evaporator

6 Pocket E-Gun

Inficon CI-100 Ebeam Pocket Control Indexer

Ti, Ni, Au, Pd/Pt, Al/Ge, Cu/Cr

- Model: Mark 40C

- Process Chamber Dimensions: 26” x 26”

- CHA SR-10 E-Beam Power Supply (10kW)

- CHA T271-4-1 Electron Beam Source

- Crucible: 4 pockets, 15cc each

- CHA Beam Sweep Controller

- CHA Auto Tech-2 Pump Cycle Controller

- Blade Position Controller

- Fixture Control and Shutter Controller

- E.B. Gun Rotation Controller

- RGA Valve Control

- Substrate Heat

- 10kW Heater Power Supply (CHA HPS-671-10)

- Sycon STC-200/SQ Deposition Rate Controller

- Granville Philips 307 Vacuum Gauge Control

- MKS Type 250 Pressure/Flow Controller

- Neslab CFT-150 Chillers, Qty 2

- CTI-Cryogenics 8500 Compressor

- Edwards E2M40 2-Stage Vacuum Pump

- Liquid Nitrogen Level Control