2012 ULVAC ENTRON-EX W300

Vintage 2012

Wafer size: 300mm

. Load Module

- Load Port

- Robot Arm

. Transfer Module

- Robot Arm(x2)

. Process Module

- Metal(TIN, Al, Au) Oxidation, Degas (8chambers)

. Utility

- AC Rack

- Pump Rack

- DC Power Supply Rack

- Heater Rack