2012 ULVAC ENTRON-EX W300
2012 ULVAC ENTRON-EX W300
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Description
Vintage 2012
Wafer size: 300mm
. Load Module
- Load Port
- Robot Arm
. Transfer Module
- Robot Arm(x2)
. Process Module
- Metal(TIN, Al, Au) Oxidation, Degas (8chambers)
. Utility
- AC Rack
- Pump Rack
- DC Power Supply Rack
- Heater Rack
Specifications
| Manufacturer | ULVAC |
| Model | ENTRON-EX W300 |
| Year | 2012 |
| Condition | Used |
| Stock Number | BM233 |