2009 Sanyo IR-EPOCH 5500
2009 Sanyo IR-EPOCH 5500
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Description
Vintage 2009
Wafer size: 6"
Robot: Single Arm, Backside Vacuum
Aligner: Backside Vacuum
Measurement stage: Edge grip (X-Y stage)
OS: Windows XP
Input: 100V 1φ 50/60Hz 20A
FTIR: Bruker IRcube
Specifications
| Manufacturer | Sanyo |
| Model | IR-EPOCH 5500 |
| Year | 2009 |
| Condition | Used |
| Stock Number | BM247 |