2014 TEL ACT 12 SOD

Vintage 2014

Wafer size: 300mm

Loadports (Qty. 4)

• Spin on Dielectric Coater (2 Cups)

• Low Temp Hot Plates (Qty. 6)

• Transition Plate (Qty. 1)

• Transition Chill Plate (Qty. 1)

• Chill Plate (Qty. 4)

• Temperature & Humidity Unit (Qty. 1)

• AC Power Box (Qty. 1)

• Temperature Control Unit (Qty. 1)

*This Tool will not come with HDD*