2004 Canon FPA-6000ES6

Vintage: 2004 (3)

2005 (1)

Wafer size: 300mm

Krf Lithography Scanner

➢ 12inch Notch type wafer size

➢ 12" LCP wafer chuck i

➢ Left Hand Feed , Type X Auto Feeder

➢ Left Hand Inline direction with TEL Lithius Interface

➢ 12inch L-type Wafer Thermal Controller Plate (WTC)

➢ R Type 12" Open Cassette

➢ Canon Standard Booth Unit

➢ Reticle Changer (Reticle SMIF Changer Unit)

➢ 6-inch Reticle Barcode Reader

➢ 6-inch Type Pellicle Particle Checker

➢ Gigaphoton G41K3-1 Excimer Laser

➢ RH Type Delivery Optics

➢ Front side only e-Console Kit

➢ 3 colour type Signal Tower 

**NO HDD will be included with this tool*