2011 CAMECA LEXFAB300

Vintage: 2011 (2)

Wafer size: 300mm

Shallow probe

*This Tool will not come with HDD*

➢ Lexes Shallow Probe Measurement

➢ 2 Load Ports

➢ Line Conditioner, 60 Hz

➢ Uninterruptible Power Supply

➢ Signal tower- 4 Lamp

➢ GEM/SECS and HSMS

➢ E84 enabled for OHT & AGV/RGV

➢ Two PIO devices for OHT

➢ E87 (Based on E39)

➢ E40/E94/E90

➢ Embarked PC INDUSTRIAL COMPUTER EC-PC/840LV/CAMECA

➢ BROOKS EFEM FX2000

➢ Power: 230VAC, Single Phase