2007 TEL TRIAS
2007 TEL TRIAS
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Description
Vintage 2007
Wafer size: 300mm
➢ *HDD will not be sold with this tool*
➢ Tel Trias CVD Deposition
➢ (4) Chamber Ti / TiCl Process
➢ (3) Load Ports
➢ Gases Used: Ticl4, CLF3, NH3, N2, H2, A
Specifications
| Manufacturer | TEL |
| Model | TRIAS |
| Year | 2007 |
| Condition | Used |
| Stock Number | BM273 |