Okamoto SPP800ATB Polisher

Was never in use

Max wafer size 150mm

ＡＴＢ Main Components 1） Loading unit

・ 4 x Cassette port with dry in

・ Wafer handling robot

・ Stand-by stage, 4inch x 8 wafers, 6 inch x 4 wafers

・ Vacuum chuck cleaning unit

2） Polish head

・ 120 Degree index

・ Driver and Hold module

・ Pressure unit

・ Maximum weight : 900kgs (Include chuck weight)

・ Clump method : vacuum

・ Rotation speed : 5-100 RPM

3） Polish unit

・ Table size 820mm x 2 tables

・ Slurry separator

・ Table oscillation

4） Un-Loading unit

・ 4 x Cassette port with wet out

・ Handling robot

・ Stand-by stage, 4inch x 8 wafers, 6 inch x 4 wafers

5） Pad conditioner

・ Brush type

6） Machine cover

・ Exhaust duct

・ HEPA Filter

７） Safety

・　Enclosed cover with inter locking

・　EMO Button

・　Signal tower

８） Optional accessories

・ Chiller for Polish table

・ Vacuum pump unit

・ Vacuum chuck for 4 inch

・ Slurry supply unit

３．Main Specifications

１）Polish table

Number of polish table 2

Diameter of polish table φ820mm

RPM of polish table 10～114rpm

Table Chiller unit By water coolant

33L/min

10～40℃

Oscillation range ±25ｍｍ

2） Chuck table

Number of Chuck table ３

Index speed 4rpm,7sec/120º

Diameter of Chuck table φ390mm

Working distance 100mm

Pressure method By air pressure (Programable)

Maximum pressure 900ｋｇ

Chuck material Ceramics chuck

Clamping method By vacuum

Wafer size 4inch×8wafers、6 inch×4wafers

Chuck RPM 5～100rpm

ＡＴＢ 3） LoadingNumber of cassette port ４

Wafer flow Dry in

4） Un-loading

Number of cassette port 4

Wafer flow Wet out

5） Pad conditioner

Conditioning method Brush / Diamond

Diameter of conditioner φ160 / φ360

6） Wafer handling

Handling robot 2 for load and un-load

Wafer clamp By vacuum

7） Slurry supply unit

Slurry tank ２５Ｌ

Mixing tank ５０Ｌ

Supply tank ５０Ｌ

Pump Diaphragm pump

９）　Machine size

Main body W2680×D2770×H2451

１０）Machine weight 9500Kg

１１）Utility

Electric power AC200V 3ph Breaker 100A

Air 100L/min More than 0.55MPa

DI water 5L/min（Ave） 33L/min （Maximum）

Exhaust 3m³/min

City water 2Ｌ/min（For vacuum pump）

Table Chiller water More than 13Ｌ/min

１２） Environment

Room temperature ２３±１℃

Humidity ５０±１０％

Vibration １０～４０ｄｂ

DI water temperature ±2 ℃ against room temperature