1999 AMAT Centura 5200 HTF - ATM EPI
1999 AMAT Centura 5200 HTF - ATM EPI
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Description
Epitaxial Silicon (EPI)
Deposition Equipment
Date of Manufacture: 1999-01-01
Currently Configured for: 200mm
CENTURA 5200 ATM EPI
Centura HTF Mainframe
x3 ATM EPI Chambers
Specifications
| Manufacturer | AMAT |
| Model | Centura 5200 HTF - ATM EPI |
| Year | 1999 |
| Condition | Used |
| Stock Number | MBM17 |