TEL CLEAN TRACK ACT 8 SINGLE BLOCK

Single Block (Resist Coater/Developer)

Resist Processing Equipment

Currently Configured for: 200mm

Single Block ACT 8

HDD/SW Included

2 Develop

2 Coat

4 HHP

7 LHP

5 CPL

2 CWH

2 TRS

2 ADH

2 TCP

WEE

Talon Tech pumps

ASML Interface