Shibaura CDE300

CDE301

Plasma Etch Tool for SI Grieß, SNIT, Imid, Titan, Tungsten

Wafer Size Range   

Minimum 300 mm  

Maximum 300 mm  

Set Size 300 mm

Number of Chambers 2

Accessories We sell the tool with all accessories.

Other Information Tool is actually still in production.

CE Marked YES

Very good condition