1996 Suss Microtec Falcon Polyimid Develope

Vintage 1996

Condition: very good

Developer with 2 chambers for spray developing.

Wafer Size Range   

Minimum 150 mm  

Maximum 200 mm

Photoresist Type Negative

Number of Cassette Elevators 2

Number of Developer Dispensers 2

Wafer Backside Rinse YES

Number of Hot Plates 0

Number of Chill Plates 0

Controller Type Microprocessor Controller Type 

Power Requirements 380 V   50/60 Hz   3 Phase