2004 HITACHI S-4800 II

Refurbished Hitachi S-4800 II.

Wafer : 200mm.

Vintage : 2004.

Secondary electron image resolution:

1.0nm (15kV, WD=4mm)

1.4nm (1kV, WD=1.5mm, Deceleration mode)

2.0nm (1kV, WD-1.5mm, Normal mode)

Magnification:

LM mode: 20 ~ 2,000X

HM mode: 100 ~ 800,000X

Specimen Stage:

Stage Motorization: 5 axis motorized

Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg.

Operating System:

Windows XP Professional

Options:

Joystick for stage control

CD Measurement Function

RS-232C

Deceleration function

Video Amplifier unit

200mm load lock (upgrade from 150mm)