Gasonics PEP3510 H Asher
Gasonics PEP3510 H Asher
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Description
Robot Type: Yaskawa XU-RCM4700
Cassette: Asyst SMIF Indexer
MW Generator: Aixcon 2kw
Chamber: Gasonics 3510+
Temp Controller: Eurothem 818S
Process Controller: IBM 7587
Wafer Size: 6~8"
Software Version: upgrade to V4.70 (optional)
Machine condition: As-is
Specifications
| Manufacturer | Gasonics |
| Model | PEP3510 H Asher |
| Condition | Used |
| Stock Number | BM6970 |