2008 Axcelis NV 8250 HT Ion Implanter

8"

- 208 VAC

- 3 Phase

- 50/60 Hz

- Power: 36 kVA

- Input Breaker: 100 A

- Largest Load: 88 A

- Max. Interrupt Capacity: 85 A

- Macobot for In-Air handling

- Gas Box with SDS Bottles

Cryopumps installed

- P3/P4/P5 On-Board 8 Edwards

Turbo Pumps installed

- P1 STP 1003 C

- P2A STP 301C

- P2B STP 1003 C

Rough pumps installed

- RP1 Edwards IGX 100 MTI

- RP2 Edwards QDP40

- RP3 Edwards iGX600M

2008 Vintage