2012 AMAT Varian VIIsta 3000XP

VIIsta 3000XP - HE14 - Implanter 300mm

DescriptionHigh-energy implanter

Wafer Size RangeMinimum300 mmMaximum300 mmSet Size300 mm

Other Information

ConditionGood

Year of Manufacture2012

Power Requirements208 V 50/60 Hz 3 Phase

CE Mark Yes

Connection top/bottom top

Source / Extraction

Source Assy I.H.C, Postless G11755940

Housing Assy, I.H.C Source E11124571

Electrode Assy, Accel/Decel E11328210

Charge Exchange Assy E11135490

Charge Exchange Chamber Liner Kit E11359140

Source Bushing E19315720

Extraction PS E19009220

Suppression PS E19297670

Gasbox  

String #1    HP Argon  

String #2    HP (DISS) BF3 MFC: Brooks GF100  

String #3    SDS AsH3 MFC: Edwards-825  

String #4    SDS PH3 MFC: Edwards-825

Beamline 

Tandetron 750keV never changed up to now

on Board Argon yes

Analyzer PS E19009131

Filter Magnet PS E19283700

Scan Suppression PS E11101360

Scan Amplifier - Trek (2x) E19007300

Corrector Magnet PS E19297970

Scan Plate Assy E11302980

Faraday Cup Assy, L.E. E11291620

Endstation

Cartridge E11482810 or E11594660

Roplat E11478360

Platen Comp II E11488222

Profiler Head E11339220

Profiler Assy, Rack & Pinion E11349360

PFG Assy, Thicker Filament E11313400

Dose Controller E11315331

E-Clamp PS E19283790

Endstation Robots, Brooks VAC-407 E40001450

EFEM

Roboter, Yaskawa XU-RC350D-J03

NXC100 ERCR-ND10-C000

NXC100, Controller ERCR-NS01-B004-E1

Loadports, TDK (4x)

Control System

Computer IAN E19207562 Win7

Computer NCS with Raid System E19012603 Win XP

Service PC E19287171 E19283200 Rev A / Win7

VCS Software V3000 09 56 200 SW-Licence must be purchased from AMAT Light Tower Yes

4 Pole GFI Option Kit Main and Remote PD Yes

High Vac Pumps

TP1 Source Pfeiffer TPH 2101 UPC PM P03 038B / included, if decon is still possible

TP2 LE-Quad Pfeiffer TPH 2101 UPC PM P03 038B / included, if decon is still possible

TP3 HE-Quad Pfeiffer TPH 2101 UPC PM P03 038B / included, if decon is still possible

Tandetron Agilent Twistoor 304FS

LoadLock Turbo (2x) Pfeiffer TMH 261 YP PM P03 534

P4 - Beamline Cryo OBIS-250FE 8185415G001XS

P5 - Beamline Cryo OBIS-250FE 8185292G001R

P1 - Endstation Cryo OB400 8116109G003XS

P2 - Endstation Cryo OB400 8116109G003XS

P3 - Endstation Cryo OB400 8116109G003XS

Dry Roughing Pumps

RP1 - Differential Seals Pump Adixen ACP 28 RP 4 not installed -Line connected to RP1

RP2 - High Energy Beamline / Endstation Rough Pump Edwards SetUp not included

RP3 - Source / Injector Module Rough Pump Edwards SetUp not included RP6 - Accelerator Module Rough Pump Edwards SetUp not included

Remote Facility Rack

Cryo Comp 1 9600 E31000177

Cryo Comp 2 9600 E31000177

Cryo Comp 3 9600 E31000177

Cryo Comp 4 IS-1000LV 8135983G002XS

GreenKit  No

Chiller SMC

Comments:

Not Included: Rough Pumps 

Roof Top Handrails (visual on Photos)

Endstation Cameras (visual on Photos)

Service Crane

Spare Parts: Included:

Source Assy I.H.C, Postless G11755940 1x Spare

Housing Assy, I.H.C Source E11124571 1x Spare

Electrode Assy, Accel/Decel E11328210 1x Spare

Charge Exchange Assy E11135490 1x Spare

Charge Exchange Chamber Liner Kit E11359140 1x Spare