2019 CleanPart EPE2061 New Process Kits

Vintage: 2019

Condition: New

These parts are for an LPE2061 EPI Tool.

We have 3 full 8" process kits that include the Bell Jar, Quartz Umbrella, Quartz Top Disk, Quartz Base Plate, Quartz Cup, & Quartz Spacer plus more.

Never used all new and still in factory suit cases.

There are new susceptors & other parts as well, like Baffles, square susceptors, and more.

just found more new quartz parts and filters for this tool & more!! Found another New 8" Bell Jar for the EPE2061!!