2001 Anelva I-4100SVⅡSR
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Description
Vintage 2001
Wafer size: 8"
Configuration overview: 2ch RIE, 1ch Ashing:
Process overview: Dry Etch Co-SiN (1)
Dry Etch Oxide (1)
Dry Etch Poly
Tool status: running
Specifications
| Manufacturer | Anelva |
| Model | I-4100SVⅡSR |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM390 |