2001 Hitachi M612A
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Description
Vintage: 2001
Wafer size: 8"
Configuration overview: 2ch EC, 2ch AC:
Process overview: Dry Etch Amorphouss-Si
Tool status: running
Specifications
| Manufacturer | Hitachi |
| Model | M612A |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM393 |