2016 KLA-Tencor BF2905 (Optical broadband plasma wafer defect inspectors)

Installation date: 2016

Down date: 2020

Still installed in Clean room

Problem discription: The tool failed optics qualification due to dead channel on CPC0.

Compared CPC-0 with CPC-1 and confirmed during TDI calibration CPC-0 detector has

abnormal pixel spike.

Error message: Illumination Profile Average Gain Out Of Range error.

Parts faulty identified:

1. CPC-0 P/N: 0676983-000 FRU ASSY,CPC ENCLOSURE GENE

2. POWER SUPPL P/N: 0356296-003 FRU ASSY,PWR SUPPLY,PS2,84VDC