2024 Axcelis PURION H200

2 available

Axcelis PURION H200, high-current ion implanters

Not yet installed

High-current ion implanters are well suited for:

• Silicon carbide (SiC) power semiconductor manufacturing
• Power MOSFET and IGBT production
• Analog and specialty device manufacturing

Additional equipment details:

• Currently configured for 150mm
• 2024 Vintage
• Brand New Tools
• CE Mark Certified
• Qty 4 FOUP Loaders
• 150mm Hot Chuck 

em On-Line?Yes 

Can Produce Wafers As-Is ?No

CE Mark Certified ?Yes 

Are any Manuals included ?StdO

EM Audit Available?Yes

3rd Party Audit Available ?Yes

Decontamination Report Exists?No

Overall Tool Condition 

Any Field Modifications ?No

All Cables present ?Yes

Any Corrosion visible on modules ?No

Any Missing / Damaged Parts ?No

Shipping Brackets Included ?Yes 

Wafer HandlerYes

Handler Type 

# of Cassette / FOUP LoadersFOUP Loaders

End-Effecter Type150mm Single

Pre-Aligner ?Yes

Mini-EnvironmentYes

Handler Options ?150mm Hot chuck

System Software 

System SW (OS) versionWindows 10

System SW (App) version3.8.3.0.2

Log-In User NameSysadmin

Log-In Passwordsysadmin

SEMI Std Options (E84, E99, etc..)E84

HSMSYes

Supporting Equipment 

Ext TransformerNo

UPSNo

Heat Exchanger / ChillerChiller

Facility Requirements 

CDAYes

DIWYes

GasGN2,PN2,Ar

Power 480V 3phase 5Wire