2003 LAM Concept-Two Inova
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Description
Vintage:
2003 (1)
2001 (2)
Wafer size: 8"
Configuration overview: 2ch HCM Ta(N)PVD: 1ch HCM Cu PVD: 1ch Etch:
Process overview: Metal PVD Cu
Tool status: running (2)
offline, working (1)
Specifications
| Manufacturer | LAM |
| Model | Concept-Two Inova |
| Year | 2003 |
| Condition | Used |
| Stock Number | BM449 |