2003 LAM Concept-Two Inova

Vintage:

2003 (1)

2001 (2)

Wafer size: 8"

Configuration overview: 2ch HCM Ta(N)PVD: 1ch HCM Cu PVD: 1ch Etch:

Process overview: Metal PVD Cu

Tool status: running (2)

offline, working (1)