2016 AMAT E500

AMAT E500

› Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes4› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP

U2

› Completeness: Total/partial/Donor tool? Please list missing parts.Total

› Date of first usage?NA

› Correct maintained?Yes

› Any damages/deficits known?No

› Manuals existing?No

› Crated: If yes…/ professional with protocol / partly / simple?No

› Detailed Configuration/Specification of the tool

› Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS

› Useable for which products?8" Thin Taiko wafers

› Wafer size (if applicable)?200mm

› Any consumables at end of lifetime?Yes (source, electrode)

› Procured from OEM or from second hand?From IR Singapore

› Any refurbishments done?No

› Was there a significant system failure in the last three years?No

› Any contaminations known?BF3, H2

ConditionGood

Year of Manufacture2016

Weight31,565 lb (14,318 kg)