AMAT HDP Centura

Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber F;Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber

Set Size200 mm

Number of Chambers3

Process GasesPH3, SiH4, NF3, He, Argon, O2

Other Information

System: 1x Mainframe; 3x process chamber; 1x Controller Rack; 1x Chiller; 3x ENI Generator Racks (Converted to separate water supply each Generator)

System: 1x Mainframe; 3x process chamber; 1x Controller Rack; 1x Chiller; 3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller; Tool will be sold without Software

AMAT Vita/Delphin Controller; Tool will be sold without Software

Power Requirements208 V 100.0 A 50/60 Hz 3 Phase

CE MarkedYES

Year of Manufacture1999

RefurbishedYES

ConditionGood

Exterior Dimensions

Width1,056.693 in (2,684.0 cm)

Depth986.220 in (2,505.0 cm)

Height944.882 in (2,400.0 cm)

Weight3,748 lb (1,700 kg)