AMAT Producer GT3 Pyra Anneal
AMAT Producer GT3 Pyra Anneal
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Description
Platform RTP Equipment
Rapid Thermal Processing (RTP) Equipment
Currently Configured for: 300mm
Asset HDD not included
· Factory Interface
o Wafer exchange platform (passive cooldown slots)
o 2 stationary robots
o Pre-aligner
o 2 Load locks
o 2 N2 Loadports w/ chrome lift pins
o Cool-down station/pass-thru
· Mainframe (including loadlock)
o 4 cooling station loadlocks (QWLL) with N2 purge
o Dual robot
o 1 pump for QWLL
o Atmospheric pressure operation
· Anneals Twin Chamber
o Dual zone heaters
o Matte shower head
o Lift pins
o Liners (2/chamber)
o 1 pump for 3 twin vacuum chuck
· Chamber Gas Panel
o 3 gas sticks
o Z700 MFCs
o Pressure regulators
o Block valves
o POC filter
· Additional Items
o Loadlock cooling capability
o Pyrometry system
o POU Filters
o Additional N2 Load Port
o Additional gas stick
Specifications
| Manufacturer | AMAT |
| Model | Producer GT3 Pyra Anneal |
| Condition | Used |
| Stock Number | BM7000 |