2001 AMAT CENTURA-HART

3 available

Complete. 

Mainframe with 4 chambers. Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallation

ProcessANISOTROP

ProcedureCUBV

Wafer Size Range

Set Size200 mm

Number of Chambers4

Power Requirements3 Phase

CE MarkedYES

Year of Manufacture2001/ 2001/ 2002

ConditionGood

Exterior DimensionsWidth66.929 in (170.0 cm)Depth96.457 in (245.0 cm)

Height98.031 in (249.0 cm)Weight4,550 lb (2,064 kg)