2014 TEL Triase+ Ti/ TiN

Vintage: 2014

Wafer size: 300mm

Main System

1* TRIASe+ Platform

1. Load Port*3 (12" wafer)
2. Loader Module
3. Lord Lock Module with Cooling*3
4. Power Distribution Unit
5. Trias Software

PF S2-0200 Safety

2* Ti Process Module

1. PCOT Ti Chamber
2. Gas Box
3. RF Generation Unit
4. Milaebo Trap Interface

Milaebo Trap Software

2* TiN Process Module

1. PCOT TiN Chamber
2. Gas Box
3. Korea Trap Interface

Korea Trap Software

Accessory Parts

1* PF Accessory

1. Special Load Port
2. UI Fixing at LM Right Side
3. EFEM & FAN Check Monitor
4. TM, LLM Leak Check Port Manual Valve Transfer Navigation System
5. PF Outer Cable
6. Edge Grip Blade
7. LM Fluorescent Light

TM RGA PORT (w/o Manual Valve)

2* Ti PM Accessory

1. Ti Leak Check Port
2. Ti PM Outer Cable

Ti Gas Box ClF3, H2, NH3 LINE

2* TiN PM Accessory

1. TiN Leak Check Port
2. TiN High Coverage Process Kit

TiN PM Outer Cable

Utility Accessory

1. Utility Interconnection Gas Female
2. FDC
3. Signal Tower
4. C V CF Special Correspondence
5. Rear Step

Cable Tray

Safety

2. PF, PM S2-0200

Korean & English Safety Label for PF and PM

Software & AGV

1. Standard GEM,GJG
2. On Line
3. OHT&AGV I/O Monitor Correspondence Omron Carrier ID Reader Correspondence Wafer Log

Wafer ID, PPID, PRJOBID