2007 TEL TELFORMULA ALD High-K

Vintage:

2015 (5)

2007 (2)

2006(1)

Wafer size: 300mm

Asset HDD not included

Tube Material:Quartz

Boat Material:Quartz

Production wafes:50

Pressure control:APC Valve 

Process Gas:ZAC(F.S:0.5sccm×２),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,ZAC)

Vaporizer TYPE:LSC-F530(TMA),TL-2014(ZAC)×２　（Dual Vaporizer)

MFC Maker:STEC

MFC Model:Z500series

Process Temp:200-300deg