2021 KLA Altair 8920i AOI Tool

KLA Altair 8920i AOI Tool

KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool

Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination

Fastest Available Excursion Monitoring Capability for >0.2 um Defects

Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers

High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X

High Performance Review Objective: 35X

Low Warpage Chuck for 6” & 8” Wafers

Multi-Region Based Thresholding

Advanced Detection Algorithms

Automated Review Sampling

Brightfield Review Mode

Litho Bevel Centricity

Autofocus Capability

Rules Based Binning

Manufactured in 2021