2007 AMAT Producer-VME200

AMAT Producer-VME200 8"

3 Chambers, the tool is working and is located in cleanroom

Procedure: FCG-TEOSLF Generator 3x

Wafer Size RangeMinimum200 mmMaximum200 mm

Number of Chambers3

CE MarkedYES

Year of Manufacture2007

ConditionVery Good

Exterior DimensionsWidth74.409 in (189.0 cm)

Depth104.331 in (265.0 cm)Height104.331 in (265.0 cm)

Weight5,664 lb (2,569 kg)