2000 AMAT HDP Centura

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks, Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

System: 1x Mainframe

3x process chamber

1x Controller Rack

1x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

1x Controller Rack

x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller

Tool will be sold without Software

Wafer Size RangeMinimum200 mm

Number of Chambers3

Process CapabilitiesHigh Density Plasma Deposition

Software Revision LevelWIN 10

Process GasesSiH4, NF3, He, Argon, O2

Power Requirements208 V 100.0 A 50/60 Hz 3 Phase

CE MarkedYES

Year of Manufacture2000

RefurbishedYES

ConditionGood