2001 STS Multiplex ICP-DRIE

STS Multiplex ICP-DRIE (Inductively Coupled Plasma – Deep Reactive Ion Etcher)

- 400V

- 50Hz

- 3 Phase

With:

- MAG 900 CT turbopump

- Power distribution & control rack cabinet with power distribution

- Electrogrip electrostatic driver

- vAT PM-7 adaptive pressure controller

- Leybold Mag Drive 1000 pump controller

- ENI ACG-10B RF generator

- ENI ACG-3B-06 RF generator

- ENI VL-400 phase shift controller

- PowerBright VC-2000 step-up/down transformer

- BOC Edwards iQDP-80 roughing pump

- Neslab RTE-211 recirculating chiller

- Gas cabinet

- LEP300 control server

- Configured for 3in substrates

2001 Vintage