2007 AMAT Vantage Radiance Plus RTP System

Vantage Radiance Plus RTP System (Rapid Thermal Process)

Wafer Sizes: 12 inch

- Vantage 5.X

- Vantage 5.X Factory Interface Rev 000 P/N 415487-RV-FI

- x2 FOUP

- x2 Radiance Plus Chambers

- Lamphead Assembly Rad Plus P/N 0010-31486

- Known Missing Parts: CH A Video Card

2007 Vintage