2006 AMAT CENTURA HTF

Equipment is under good condition (w/ 3 chambers)

Currently inside the cleanroom environment; under idle/warm down condition

DescriptionDoping & Thickness Uniformity

Wafer Size RangeMinimum200 mmMaximum200 mmSet Size200 mm

Cassette to CassetteYES

ConditionGood

Year of Manufacture2006

Exterior DimensionsWidth196.850 in (500.0 cm)

Depth70.866 in (180.0 cm)Height106.299 in (270.0 cm)Weight7,716 lb (3,500 kg)