ASM International Eagle-12 Rapidfire

Wafer size: 300mm

Asset HDD not included

[Chamber A]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W

[Chamber B]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W

[Chamber C]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W