2003 Kokusai Electric Co., Ltd Zestone-V(B) DJ-1205V

Vintage: 2003

Wafer size: 300mm

Asset HDD not included

Process: Doped polysilicon

Heater: Carry

Process Condition: LP

Maximum Operating Temperature(C):850℃

N2 Load Lock:Load lock type N2 substitution

Qty. of Production Wafers: 100

Boat Operation (Handling Position): 1 Boat Type / 1 Boat Operation (B/E)

Gas(SLM):SiH4(4.000);PH3-1(0.300);N2-1(30.000):N2-2(0.500):N2-3(10.000):N2-4(5.000):N2-5(5.000):LLP-N2(200.000):O2(5.000):Clf3(5.000)

Gas(sccm):PH-2(50.000):PH-3(50.000):PH-4(50.000):PH-5(50.000)