2006 AMAT Reflexion LK Copper

Copper CMP

CMP Equipment

Date of Manufacture: 2006-01-01

Currently Configured for: 300mm

Process: CUCMP

Tool config is based on original PO, please verify tool details at tool inspection

Base System

Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.

Polisher Skins : Dark P1, P2, P3, and P4: 4910 compliant.

Gap Wash: 120 degree nozzles

Load Cup Wafer Exchanger: Enhanced counter balance springs

Nova 3090 Ready: None

Monitor 1 Location : Cart

Monitor 2 Location : Ergo Arm type

Light Tower: Factory Interface and Polisher Sides

Software

LK Software: lp3B4.5_29

Factory Interface : fb4.9_14 Beta

ISRM / RTPC: isB3.0_10

RTPC: B3.0_11

Platen 1

Platen Type : HIGH SPEED (<= 350 RPM)

Endpoint : RTPC

Endpoint: N/A

High Pressure Rinse Flow Meter : 1350-00195 (4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA

Rinse Arms: High Pressure/Flow

Flow Meter : 50-500 ml/min

Temperature Control: P laten Cooling Water

Platen 2

Platen Type : HIGH SPEED (<= 350 RPM)

Endpoint : Full Scan Optical ISRM

Endpoint: N/A

High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA

Rinse Arms: High Pressure/Flow

Flow Meter : 50-500 ml/min

Temperature Control: P laten Cooling Water

Platen 3

Platen Type: HIGH SPEED (<= 350 RPM)

Endpoint : Full Scan Optical ISRM

Endpoint: N/A

High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min) F LOW METER ASSY 1/2OD 1.6-20LPM PFA

Rinse Arms: High Pressure/Flow

Flow Meter : 50-500 ml/min

Temperature Contro: l Platen Cooling Water

Polisher

Polisher Technology : SLURRY AND PAD

Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)

Cross Break: N/A

Pad Wafer Loss Sensor: DARK PAD SENSOR

InterPlaten Clean : No

ISRM Laser Key Switch: Y es

Slurry Delivery System : 5 x 10 CLC SDS

Head 1 Power Cable : 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF

Head 2 Power Cable : 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF

Head 3 Power Cable : 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF

Head 4 Power Cable : 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF

Head 1 Encoder Cable: 0150-16281C ABLE ASSY, 300MM, HR1, DRIVER-RESOLVER

Head 2 Encoder Cable: 0150-16282C ABLE ASSY, 300MM, HR2, DRIVER-RESOLVER

Head 3 Encoder Cable: 0150-16283C ABLE ASSY, 300MM, HR3, DRIVER-RESOLVER

Head 4 Encoder Cable: 0150-16284C ABLE ASSY, 300MM, HR4, DRIVER-RESOLVER

G4+ UPA : SMC UPA

G4+ UPA : SMC UPA

Cleaner Meg

Chemical 1:C LC 1-250 ml/min

Chemical 2:C LC 1-250 ml/min

Brush Box 1

Chemical 1 : 0-1250ml/min

Chemical 2 : 0-1250ml/min

Brush box 2

Brush LDM Type: TwoChemInLineMixed

Chemical 1 : 0-1250ml/min

Chemical 2 : 0-1250ml/min

Dryer Module

Dryer Type :VAPOR DRYER

Recovery Module: N /A

Output Station Dampner: Cap is Viton

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales