NIKON AMI-3300
NIKON AMI-3300
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Description
Wafer size: 300mm
Tool has been de-installed and is stored in an off-site warehouse.
A Hard Disk Drive will be removed from tool.
Main SWV：Ver5.30
Light source：Deep UV Lamp,Metal halide Lamp
Wave Length：E-Line ～ 248nm,VIS
Minimum Line Width：55nm
PPH：160W/h
Specifications
| Manufacturer | NIKON |
| Model | AMI-3300 |
| Condition | Used |
| Stock Number | BM515 |