1999 AMAT P5000 XT

The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

Tool facts:

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

Wafer Size RangeMinimum200 mmSet Size200 mm

Number of Chambers2

Process Capabilities2x MXP Narrow Gap Pos. A/B

Process GasesHbr, NF3, NF3-2, N2, He/O2, Ar, CF4

Power Requirements208 V 50.0 A 50/60 Hz 3 Phase

Year of Manufacture1999

RefurbishedYES

ConditionVery Good

Weight2,205 lb (1,000 kg)