1999 AMAT P5000 XT

AMAT P5000 XT (Poly - Trench)

Pictures are from parallel tool!

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

Wafer Size RangeMinimum200 mmSet Size200 mm

Number of Chambers2

Process Capabilities2x MXP Narrow Gap Pos. A/B

Process GasesHbr, NF3, NF3-2, N2, He/O2, Ar, CF4

Power Requirements208 V 50.0 A 50/60 Hz 3 Phase

Year of Manufacture1999

ConditionGood