1994 Varian VSE E500HP

AMAT/Varian E500HP (Midcurrentimplant) 

Wafer Size RangeMinimum100 mmMaximum200 mmSet Size150 mm

ConditionGood

Year of Manufacture1994

Power Requirements200-208 V 45-70 Hz 3 Phase

Exterior DimensionsWidth125.984 in (320.0 cm)Depth204.724 in (520.0 cm)Height98.425 in (250.0 cm)

Weight23,369 lb (10,600 kg)