2001 ASM Advance 400
2001 ASM Advance 400
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Available quantity:4
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Description
4 AVAILABLE- PLEASE ENQUIRE
Vintage: 2001/ 2008/ 1999/ 1996
ASM Furnace Vertical - OFENV12D
OFENV12D Furnace with 2 Tubes
1x Reactor Dot. Poly Low Pressure
1x Reactor Atmosphere WET-OXID
Wafer Size RangeMinimum150 mmMaximum200 mmSet Size200 mm
Number of Cassette Platforms24
Robot Manufacturer/ModelGenmark
Controller Manufacturer/ModelGenmark
InterfaceRS 232
Process GasesSiH4; Ph3; O2; H2; N2;HCl
Year of Manufacture2001
ConditionGood
Specifications
| Manufacturer | ASM |
| Model | Advance 400 |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM7065 |