2003 ASML AT1200B

Exposure Tool ASML 8" AT1200B

Exposure Tool still in production, located in cleanroom

Excimer Laser type: CYMER XLA165

Wafer Size RangeMinimum200 mmMaximum200 mm

AccessoriesExcimer Laser type: CYMER XLA165

Other Informationstill in production

Year of Manufacture2003

ConditionGood

CE MarkedYES

Exterior DimensionsWidth82.677 in (210.0 cm)Depth179.528 in (456.0 cm)

Height88.189 in (224.0 cm)

Weight18,408 lb (8,350 kg)