1996 Canon i4

Vintage Jan-96

Wafer Size (6'', 8'', 12'', …) 8"

Process Patterning

Configuration Left Hand Feed Wafer Feeder. 6 inch Reticle Changer

Status Deinstalled, Crated.

Condition Was in (limited) production up to deinstall in 2023

Missing Parts None

Cassette BCR Yes

Reticle BCR Yes

PPC No

RPC No

As-is

Comments Was in production as non-crit. Had limited lens capabilities. No pictures taken before deinstall.