1995 Axcelis GSD 180E2

Disk-Drive:Direct-DriveDose-Type:RegularSource-Type:ELS4 IHC-Source without VaporizerHighvoltage-Transformer:both OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSUN Solaris AXI 3HE (special case)Second-WorkstationSUN Sparc5 on cart with printerSoftware-Version:6.4.3 (no license included)Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 Cell TypeOptions:Accel-Higvoltage Probe installedConditiontool run fully productive (24/7) between 15 and 160kv Energy until we switched it off on 03/2026AvailabilityImmediately. Notes:slight corrosion spots(rusty) on the frame, just a visual matter Clean-Room Table on frontside missing 0,5L Xe-Plasma-Bottle Holder missing + Terminal Water Cover missing HPES-Upgrade installed, but Upgrades were stoped after HPES-Upgrade! Rough-Pumps and Disk-Chiller not included modified Gasbox-Frame for 6L-Bottles modified Plasma-Gun Power-Supply installed(TDK) Minor modifications on tool: like interlocks,... No Manual-Set/ no Spares