Gasonics L3510

Gasonics L3510

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Description

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Software: v7.40 GEM

Pedestal: Anodized Aluminum

Robot: Koro

Pump: IQDP80

Blower: QMB250

MFC:

Qty 2 - Unit 12000A

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Specifications

ManufacturerGasonics
ModelL3510
ConditionUsed
Stock NumberBM7087