Wafer size: 300mm

Asset HDD not included

System:EKA101

Project:414248

MES:APOXL10100

Mainframe Type: Platform:Producer eXT MF

SW Version:B3.1_65

Server Type

FE:306M

FI:306M

RT:SBC

Chamber Type

A:Twin- (EO2) DIELECTRIC ETCH TWIN XT

C:Twin- (EO2) DIELECTRIC ETCH TWIN XT

Customer ID:EKA101

Project ID(AMAT):414248NSO

Warranty end date: 01/28/09

Application (Process):Oxdie

FI robot Type:YASKAWA AT

Robot P/N: 0190-14738

Controller P/N: 0190-27387

Robot Type:VXP

Materials:Aluminum

Applied Materials AMAT Producer Etch XT Dielectric